Abstract: Acceleration sensor is usually applied to measure the face angle and the inclination angle of the drilling trajectory measurement system, factors such as the manufacturing process, the mechanical processing of probe and the assembly produce measurement error of tool face angle and inclination. In order to correct the above error, the paper first introduced the trajectory measurement while drilling system and its working principle, and then analyzed the error of the acceleration sensor, the error model of MEMS acceleration sensor and 36-position calibration method were built, and the corresponding test was completed. The experimental results indicate that the accuracy for inclination angle is 0.2°, the accuracy for face angle is 0.2°, and the two parameters influence rarely each other. As a result, the acceleration error model can meet the accuracy requirements in actual underground drilling.